MEMS Terahertz Focal Plane Array for use with Infrared Imaging Systems

LT Jesse Ashmore, USN

This thesis studied the possibility of metamaterials absorbing narrow band terahertz (THz) radiation and converting it to longwave infrared (LWIR) for the purposes of THz imaging using commercially available infrared (IR) cameras. For enhancing the conversion efficiency and spatial resolution, the metamaterial was integrated with a thermally isolated pixel to form a focal plane array. The device was subjected to a 4.7 THz quantum cascade laser (QCL) and its response was analyzed to characterize its performance in terms of frequency response and sensitivity. The results are used to determine the device’s applicability as a simple, inexpensive, and compact THz to IR convertor.